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Proceedings Papers

Surface Contaminant Removal Using Short-Pulse Lasers

Leslie M. Phinney, Chang-Lin Tien
Proc. ASME. IMECE96, Transport Phenomena in Materials Processing and Manufacturing, 55-61, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1030
https://doi.org/10.1115/IMECE1996-1030
View Paper titled, Surface Contaminant Removal Using Short-Pulse Lasers
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Topics: Lasers, Desorption, Thermal desorption, Electrons, Microelectromechanical systems, Temperature, Contamination, Film thickness, Fluence (Radiation measurement), Heating
Proceedings Papers

Effects of Convection on Experimental Investigation of Heat Generation During Plastic Deformation

Wyatt Hodges, Leslie M. Phinney, Brian Lester, Brandon Talamini, Amanda Jones
Proc. ASME. IMECE2021, Volume 11: Heat Transfer and Thermal Engineering, V011T11A005, November 1–5, 2021
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2021-68479
https://doi.org/10.1115/IMECE2021-68479
View Paper titled, Effects of Convection on Experimental Investigation of Heat Generation During Plastic Deformation
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Topics: Computer simulation, Convection, Deformation, Heat
Proceedings Papers

Nanosecond Laser Experiments of Microstructure Adhesion Reduction

James W. Rogers, Leslie M. Phinney
Proc. ASME. IMECE99, Heat Transfer: Volume 3, 25-30, November 14–19, 1999
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1999-1059
https://doi.org/10.1115/IMECE1999-1059
View Paper titled, Nanosecond Laser Experiments of Microstructure Adhesion Reduction
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Topics: Adhesion, Lasers, Microcantilevers, Stiction, Cantilevers, Fluence (Radiation measurement), Nd-YAG lasers, Polysilicon
Proceedings Papers

A Thermomechanical Model for Adhesion Reduction of MEMS Microcantilevers

James W. Rogers, Thomas J. Mackin, Leslie M. Phinney
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 157-165, November 11–16, 2001
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2001/MEMS-23823
https://doi.org/10.1115/IMECE2001/MEMS-23823
View Paper titled, A Thermomechanical Model for Adhesion Reduction of MEMS Microcantilevers
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Topics: Adhesion, Microcantilevers, Microelectromechanical systems, Thermomechanics, Lasers, Fracture (Materials), Irradiation (Radiation exposure), Stiction, Fracture mechanics, Heating
Journal Articles

Mean Free Path Effects on the Experimentally Measured Thermal Conductivity of Single-Crystal Silicon Microbridges

Timothy S. English, Leslie M. Phinney, Patrick E. Hopkins, Justin R. Serrano
Journal: ASME Journal of Heat and Mass Transfer
Publisher: ASME
Article Type: Research-Article
J. Heat Mass Transfer. September 2013, 135(9): 091103.
Paper No: HT-12-1408
https://doi.org/10.1115/1.4024357
Published Online: July 26, 2013
View Article titled, Mean Free Path Effects on the Experimentally Measured Thermal Conductivity of Single-Crystal Silicon Microbridges
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Topics: Silicon, Temperature, Thermal conductivity, Crystals, Mean free path, Phonons
Proceedings Papers

Raman Thermometry and Thermal Modeling of Highly Doped Silicon-on-Insulator Joule Heated MEMS Bridges Under Varying Gas Pressures

Justin R. Serrano, Edward S. Piekos, Leslie M. Phinney
Proc. ASME. HT2012, Volume 1: Heat Transfer in Energy Systems; Theory and Fundamental Research; Aerospace Heat Transfer; Gas Turbine Heat Transfer; Transport Phenomena in Materials Processing and Manufacturing; Heat and Mass Transfer in Biotechnology; Environmental Heat Transfer; Visualization of Heat Transfer; Education and Future Directions in Heat Transfer, 525-531, July 8–12, 2012
Publisher: American Society of Mechanical Engineers
Paper No: HT2012-58114
https://doi.org/10.1115/HT2012-58114
View Paper titled, Raman Thermometry and Thermal Modeling of Highly Doped Silicon-on-Insulator Joule Heated MEMS Bridges Under Varying Gas Pressures
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Topics: Bridges (Structures), Joules, Microelectromechanical systems, Modeling, Silicon-on-insulator, Temperature measurement, Temperature, Simulation, Heat transfer, Pressure
Proceedings Papers

Thermal Conductivity of Single-Crystal Silicon Microbridges Measured by Electrical Resistance Thermometry and Time-Domain Thermoreflectance

Timothy S. English, Leslie M. Phinney, Patrick E. Hopkins, Justin R. Serrano
Proc. ASME. MNHMT2012, ASME 2012 Third International Conference on Micro/Nanoscale Heat and Mass Transfer, 713-722, March 3–6, 2012
Publisher: American Society of Mechanical Engineers
Paper No: MNHMT2012-75179
https://doi.org/10.1115/MNHMT2012-75179
View Paper titled, Thermal Conductivity of Single-Crystal Silicon Microbridges Measured by Electrical Resistance Thermometry and Time-Domain Thermoreflectance
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Topics: Crystals, Electrical resistance, Silicon, Temperature measurement, Thermal conductivity, Thermoreflectance, Temperature, Microelectromechanical systems, Modeling, Silicon-on-insulator
Journal Articles

Raman and Infrared Thermometry for Microsystems

Leslie M. Phinney, Wei-Yang Lu, Justin R. Serrano
Journal: Journal of Thermal Science and Engineering Applications
Publisher: ASME
Article Type: Research-Article
J. Thermal Sci. Eng. Appl. September 2013, 5(3): 031011.
Paper No: TSEA-11-1134
https://doi.org/10.1115/1.4023395
Published Online: July 15, 2013
View Article titled, Raman and Infrared Thermometry for Microsystems
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Topics: Microactuators, Temperature, Temperature measurement, Microelectromechanical systems, Silicon-on-insulator
Proceedings Papers

Characterization of SOI MEMS Sidewall Roughness

Leslie M. Phinney, Bonnie B. McKenzie, James A. Ohlhausen, Thomas E. Buchheit, Randy J. Shul
Proc. ASME. IMECE2011, Volume 11: Nano and Micro Materials, Devices and Systems; Microsystems Integration, 187-193, November 11–17, 2011
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2011-62593
https://doi.org/10.1115/IMECE2011-62593
View Paper titled, Characterization of SOI MEMS Sidewall Roughness
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Topics: Microelectromechanical systems, Silicon-on-insulator, Surface roughness, Silicon, Atomic force microscopy, Actuators, Chemical etching, Etching, Manufacturing, Polymers
Journal Articles

Measuring the Thermal Conductivity of Porous, Transparent SiO 2 Films With Time Domain Thermoreflectance

Patrick E. Hopkins, Bryan Kaehr, Leslie M. Phinney, Timothy P. Koehler, Anne M. Grillet, Darren Dunphy, Fred Garcia, C. Jeffrey Brinker
Journal: ASME Journal of Heat and Mass Transfer
Publisher: ASME
Article Type: Research Papers
J. Heat Mass Transfer. June 2011, 133(6): 061601.
https://doi.org/10.1115/1.4003548
Published Online: March 9, 2011
View Article titled, Measuring the Thermal Conductivity of Porous, Transparent SiO 2 Films With Time Domain Thermoreflectance
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Topics: Glass, Heat transfer, Thermal conductivity, Thermoreflectance, Heat, Geometry, Transparency, Thin films, Temperature
Proceedings Papers

Effects of Surface Roughness and Oxide Layer on the Thermal Boundary Conductance at Aluminum/Silicon Interfaces

Patrick E. Hopkins, Leslie M. Phinney, Justin R. Serrano, Thomas E. Beechem
Proc. ASME. IHTC14, 2010 14th International Heat Transfer Conference, Volume 6, 313-319, August 8–13, 2010
Publisher: American Society of Mechanical Engineers
Paper No: IHTC14-22268
https://doi.org/10.1115/IHTC14-22268
View Paper titled, Effects of Surface Roughness and Oxide Layer on the Thermal Boundary Conductance at Aluminum/Silicon Interfaces
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Topics: Aluminum, Electrical conductance, Silicon, Surface roughness, Electromagnetic scattering, Radiation scattering, Scattering (Physics), Atomic force microscopy, Interfacial thermal resistance, Mean free path
Proceedings Papers

Optical Measurements of the Thermal Conductivity of Porous SiO 2 Films

Patrick E. Hopkins, Bryan J. Kaehr, Leslie M. Phinney, Timothy P. Koehler, Anne M. Grillet, Darren Dunphy, Fred Garcia, C. Jeffrey Brinker
Proc. ASME. IHTC14, 2010 14th International Heat Transfer Conference, Volume 6, 361-369, August 8–13, 2010
Publisher: American Society of Mechanical Engineers
Paper No: IHTC14-22488
https://doi.org/10.1115/IHTC14-22488
View Paper titled, Optical Measurements of the Thermal Conductivity of Porous SiO 2 Films
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Topics: Optical measurement, Thermal conductivity, Algorithms, Geometry, Composite materials, Heat, Heat transfer, Nanocomposites, Nanomaterials, Probes
Proceedings Papers

Tunable Thermal Conductivity of TiO 2 Films of Close-Packed Nanoparticles

Patrick E. Hopkins, Manish Mittal, Leslie M. Phinney, Anne M. Grillet, Eric M. Furst
Proc. ASME. AJTEC2011, ASME/JSME 2011 8th Thermal Engineering Joint Conference, T30047, March 13–17, 2011
Publisher: American Society of Mechanical Engineers
Paper No: AJTEC2011-44136
https://doi.org/10.1115/AJTEC2011-44136
View Paper titled, Tunable Thermal Conductivity of TiO 2 Films of Close-Packed Nanoparticles
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Topics: Nanoparticles, Thermal conductivity, Aluminum, Anisotropy, Coating processes, Coatings, Flow (Dynamics), Glass, Particulate matter, Thermoreflectance
Proceedings Papers

Raman and Infrared Thermometry for Microsystems

Leslie M. Phinney, Wei-Yang Lu, Justin R. Serrano
Proc. ASME. AJTEC2011, ASME/JSME 2011 8th Thermal Engineering Joint Conference, T30006, March 13–17, 2011
Publisher: American Society of Mechanical Engineers
Paper No: AJTEC2011-44097
https://doi.org/10.1115/AJTEC2011-44097
View Paper titled, Raman and Infrared Thermometry for Microsystems
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Topics: Microelectromechanical systems, Temperature measurement, Microactuators, Silicon-on-insulator, Data collection, Resolution (Optics), Measurement uncertainty, Temperature, Temperature profiles
Journal Articles

Re-examining Electron-Fermi Relaxation in Gold Films With a Nonlinear Thermoreflectance Model

Patrick E. Hopkins, Leslie M. Phinney, Justin R. Serrano
Journal: ASME Journal of Heat and Mass Transfer
Publisher: ASME
Article Type: Technical Briefs
J. Heat Mass Transfer. April 2011, 133(4): 044505.
https://doi.org/10.1115/1.4002778
Published Online: January 14, 2011
View Article titled, Re-examining Electron-Fermi Relaxation in Gold Films With a Nonlinear Thermoreflectance Model
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Topics: Electrons, Relaxation (Physics), Thermoreflectance, Electron emission, Thin films
Proceedings Papers

Wavelength and Coherence Independent Method of Optically Exciting Mechanical Resonance

Gregory N. Nielson, Leslie M. Phinney, David S. Epp, Jonathan Wittwer, Vipin Gupta, Paul Resnick, Uma Krishnamoorthy
Proc. ASME. IMECE2009, Volume 12: Micro and Nano Systems, Parts A and B, 535-544, November 13–19, 2009
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2009-12980
https://doi.org/10.1115/IMECE2009-12980
View Paper titled, Wavelength and Coherence Independent Method of Optically Exciting Mechanical Resonance
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Topics: Resonance, Wavelength, Cantilevers, Excitation, Microelectromechanical systems, Sunlight, Aluminum, Cantilever beams, Finite element analysis, Light sources
Proceedings Papers

Dimensionality Analysis of Thermal Transport in Multilayer Thin Film Systems

Patrick E. Hopkins, Justin R. Serrano, Leslie M. Phinney, Sean P. Kearney, Thomas W. Grasser, C. Thomas Harris
Proc. ASME. IMECE2009, Volume 12: Micro and Nano Systems, Parts A and B, 993-1001, November 13–19, 2009
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2009-12238
https://doi.org/10.1115/IMECE2009-12238
View Paper titled, Dimensionality Analysis of Thermal Transport in Multilayer Thin Film Systems
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Topics: Thin films, Heating, Probes, Pumps, Thermoreflectance, Top-tensioned risers, Transients (Dynamics), Accounting, Electrical conductance, Errors
Journal Articles

Criteria for Cross-Plane Dominated Thermal Transport in Multilayer Thin Film Systems During Modulated Laser Heating

Patrick E. Hopkins, Justin R. Serrano, Leslie M. Phinney, Sean P. Kearney, Thomas W. Grasser, C. Thomas Harris
Journal: ASME Journal of Heat and Mass Transfer
Publisher: ASME
Article Type: Research Papers
J. Heat Mass Transfer. August 2010, 132(8): 081302.
https://doi.org/10.1115/1.4000993
Published Online: May 20, 2010
View Article titled, Criteria for Cross-Plane Dominated Thermal Transport in Multilayer Thin Film Systems During Modulated Laser Heating
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Topics: Electrical conductance, Heating, Lasers, Probes, Pumps, Thermal conductivity, Thermoreflectance, Thin films, Top-tensioned risers, Heat conduction
Journal Articles

Raman Thermometry Measurements and Thermal Simulations for MEMS Bridges at Pressures From 0.05 Torr to 625 Torr

Leslie M. Phinney, Justin R. Serrano, Edward S. Piekos, John R. Torczynski, Michael A. Gallis, Allen D. Gorby
Journal: ASME Journal of Heat and Mass Transfer
Publisher: ASME
Article Type: Research Papers
J. Heat Mass Transfer. July 2010, 132(7): 072402.
https://doi.org/10.1115/1.4000965
Published Online: April 28, 2010
View Article titled, Raman Thermometry Measurements and Thermal Simulations for MEMS Bridges at Pressures From 0.05 Torr to 625 Torr
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Topics: Bridges (Structures), Finite element analysis, Heat transfer, Microelectromechanical systems, Pressure, Simulation, Temperature, Temperature measurement, Heat conduction, Temperature profiles
Proceedings Papers

Raman Thermometry Measurements and Thermal Simulations for MEMS Bridges at Pressures From 0.05 to 625 Torr

Leslie M. Phinney, Justin R. Serrano, Edward S. Piekos, John R. Torczynski, Michael A. Gallis, Allen D. Gorby
Proc. ASME. HT2009, Volume 2: Theory and Fundamental Research; Aerospace Heat Transfer; Gas Turbine Heat Transfer; Computational Heat Transfer, 389-398, July 19–23, 2009
Publisher: American Society of Mechanical Engineers
Paper No: HT2009-88583
https://doi.org/10.1115/HT2009-88583
View Paper titled, Raman Thermometry Measurements and Thermal Simulations for MEMS Bridges at Pressures From 0.05 to 625 Torr
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Topics: Bridges (Structures), Engineering simulation, Microelectromechanical systems, Simulation, Temperature measurement, Pressure, Finite element analysis, Finite element model, Heat transfer, Materials properties