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Journal Articles

An Ultraminiature MEMS Pressure Sensor With High Sensitivity for Measurement of Intramuscular Pressure (IMP) in Patients With Neuromuscular Diseases

A. S. Sezen, R. Rajamani, D. Morrow, K. R. Kaufman, B. K. Gilbert
Journal: Journal of Medical Devices
Publisher: ASME
Article Type: Research Papers
J. Med. Devices. September 2009, 3(3): 031006.
https://doi.org/10.1115/1.3192103
Published Online: September 1, 2009
...A. S. Sezen; R. Rajamani; D. Morrow; K. R. Kaufman; B. K. Gilbert An ultraminiature micropressure sensor to accurately measure intramuscular pressure has been developed. The MEMS sensor is fabricated through surface micromachining and consists of a capacitive array of eight 150 μ m diameter sensing...
View Article titled, An Ultraminiature MEMS Pressure Sensor With High Sensitivity for Measurement of <span class="search-highlight">Intramuscular</span> <span class="search-highlight">Pressure</span> (IMP) in Patients With Neuromuscular Diseases
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Topics: Membranes, Microelectromechanical systems, Microfabrication, Pressure, Pressure sensors, Sensors, Muscle, Wire, Capacitance, Vacuum