... ], component alignment [ 7–9 ], and metrology [ 10 , 11 ]. Moreover, compliant mechanisms are ubiquitous in microfabricated devices and systems because monolithic construction is easily achieved by lithography and etching of silicon wafers [ 12 ]. compliant mechanism accuracy path generation flexure...

...D. Mundo; J. Y. Liu; H. S. Yan The paper proposes a method for the optimal synthesis of planar mechanisms, where a combination of cams and linkages is used in order to obtain a precise path generation. As a first step, based on Gruebler’s mobility criterion, a linkage mechanism is considered...

... of three categories: Motion generation, path generation, and function generation ( 4 5 6 ). Motion generation is the controlled translation and rotation of a moving reference frame relative to a fixed reference frame. Path generation is the controlled translation of a single point in a moving frame...

...Yong Liu; Renbin Xiao This paper presents an optimal synthesis method for path generation of planar mechanisms, in which a new path-description method named refined numerical representation is proposed to define the object function of the optimization model for path generation...