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Keywords: microelectromechanical systems
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Journal Articles
Journal:
Journal of Mechanical Design
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. January 2012, 134(1): 011008.
Published Online: January 4, 2012
... by the characteristic torque. These metrics account for the variation of both axial and off-axis stiffness over the range of displacement. The metrics are demonstrated for several microelectromechanical systems (MEMS) that are sensitive to size because of high cost and off-axis stiffness because of function. The use...
