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Keywords: metal-assisted chemical etching
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Journal Articles
Journal Articles
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. November 2023, 145(11): 114501.
Paper No: MANU-23-1284
Published Online: July 21, 2023
... is unclear. This study investigated the effects of bubbles on manufacturing Au dendrites and silicon nanowires through metal-assisted chemical etching. The results of manufacture under three conditions (standard, shaking, and vacuum conditions) were compared. Synchronous growth of Au dendrites and silicon...
Journal Articles