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Keywords: hydrogen
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Journal Articles
Pee-Yew Lee, Chun-Jen Weng, Hung Ji Huang, Li-Yan Wu, Guo-Hao Lu, Chao-Feng Liu, Cheng-You Chen, Ting-Yu Li, Yung-Sheng Lin
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. September 2023, 145(9): 094501.
Paper No: MANU-23-1086
Published Online: May 9, 2023
... hydrogen metal-assisted chemical etching nanowire micro- and nano-machining and processing National Science and Technology Council, Taiwan 10.13039/501100001868 111-2314-B-239-002 111-2221-E-492-002-MY2 Despite breakthroughs in various new materials in recent years, silicon (Si...
