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Journal Articles

Effects of Bubbles on Manufacturing Gold Dendrites and Silicon Nanowires Through the Fluoride-Assisted Galvanic Replacement Reaction

Pee-Yew Lee, Hung Ji Huang, Tsung-Shine Ko, Ying-Lun Hung, Li-Yan Wu, Jia-Jun Fan, Yung-Sheng Lin
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. November 2023, 145(11): 114501.
Paper No: MANU-23-1284
https://doi.org/10.1115/1.4062878
Published Online: July 21, 2023
...Pee-Yew Lee; Hung Ji Huang; Tsung-Shine Ko; Ying-Lun Hung; Li-Yan Wu; Jia-Jun Fan; Yung-Sheng Lin The fluoride-assisted galvanic replacement reaction is a conventional method for fabricating metallic dendrites on silicon wafers. However, whether bubbles affect manufacturing metallic dendrites...
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Topics: Bubbles, Manufacturing, Metals, Nanowires, Silicon, Vacuum, Semiconductor wafers, Chemical etching, Etching
Journal Articles

Bubble Effects on Manufacturing of Silicon Nanowires by Metal-Assisted Chemical Etching

Pee-Yew Lee, Chun-Jen Weng, Hung Ji Huang, Li-Yan Wu, Guo-Hao Lu, Chao-Feng Liu, Cheng-You Chen, Ting-Yu Li, Yung-Sheng Lin
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. September 2023, 145(9): 094501.
Paper No: MANU-23-1086
https://doi.org/10.1115/1.4062392
Published Online: May 9, 2023
...Pee-Yew Lee; Chun-Jen Weng; Hung Ji Huang; Li-Yan Wu; Guo-Hao Lu; Chao-Feng Liu; Cheng-You Chen; Ting-Yu Li; Yung-Sheng Lin Micro/nano-textured Si wafers manufactured using metal-assisted chemical etching (MACE) have been the focus of several studies, but the mechanism of bubble generation during...
View Article titled, <span class="search-highlight">Bubble</span> Effects on Manufacturing of Silicon Nanowires by Metal-Assisted Chemical Etching
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Topics: Bubbles, Chemical etching, Etching, Hydrogen, Metals, Nanowires, Semiconductor wafers, Manufacturing, Silicon