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Journal Articles

Cross-Plane Phonon Conduction in Polycrystalline Silicon Films

Jungwan Cho, Daniel Francis, Pane C. Chao, Mehdi Asheghi, Kenneth E. Goodson

Publisher: ASME

J. Heat Mass Transfer. July 2015, 137(7): 071303.

Paper No: HT-14-1609

https://doi.org/10.1115/1.4029820

Published Online: July 1, 2015

View Article titled, Cross-Plane Phonon Conduction in Polycrystalline Silicon Films

Topics: Diamonds, Heat conduction, Phonons, Polysilicon, Thermal conductivity, Grain boundaries, Temperature, Electromagnetic scattering, Radiation scattering, Scattering (Physics)

Journal Articles

Raman Thermometry Measurements and Thermal Simulations for MEMS Bridges at Pressures From 0.05 Torr to 625 Torr

Leslie M. Phinney, Justin R. Serrano, Edward S. Piekos, John R. Torczynski, Michael A. Gallis, Allen D. Gorby

Publisher: ASME

J. Heat Mass Transfer. July 2010, 132(7): 072402.

https://doi.org/10.1115/1.4000965

Published Online: April 28, 2010

View Article titled, Raman Thermometry Measurements and Thermal Simulations for MEMS Bridges at Pressures From 0.05 Torr to 625 Torr

Topics: Bridges (Structures), Finite element analysis, Heat transfer, Microelectromechanical systems, Pressure, Simulation, Temperature, Temperature measurement, Heat conduction, Temperature profiles

Journal Articles

Thermal Conductivity Measurements on Polycrystalline Silicon Microbridges Using the 3 ω Technique

Patrick E. Hopkins, Leslie M. Phinney

Publisher: ASME

J. Heat Mass Transfer. April 2009, 131(4): 043201.

https://doi.org/10.1115/1.3072907

Published Online: February 11, 2009

View Article titled, Thermal Conductivity Measurements on Polycrystalline Silicon Microbridges Using the 3 ω Technique

Topics: Polysilicon, Thermal conductivity, Temperature, Steady state, Bridges (Structures)

Journal Articles

Raman Thermometry of Polysilicon Microelectro-mechanical Systems in the Presence of an Evolving Stress

Mark R. Abel, Samuel Graham, Justin R. Serrano, Sean P. Kearney, Leslie M. Phinney

Publisher: ASME

J. Heat Mass Transfer. March 2007, 129(3): 329–334.

https://doi.org/10.1115/1.2409996

Published Online: May 31, 2006

View Article titled, Raman Thermometry of Polysilicon Microelectro-mechanical Systems in the Presence of an Evolving Stress

Topics: Calibration, Polysilicon, Spectral linewidth, Stress, Temperature, Temperature measurement, Uncertainty, Thermal stresses, Raman spectroscopy, Microelectromechanical systems

Journal Articles

Transient Thermal Bubble Formation on Polysilicon Micro-Resisters

Jr-Hung Tsai, Liwei Lin

Publisher: ASME

J. Heat Mass Transfer. April 2002, 124(2): 375–382.

https://doi.org/10.1115/1.1445136

Published Online: October 18, 2001

View Article titled, Transient Thermal Bubble Formation on Polysilicon Micro-Resisters

Topics: Boiling, Bubbles, Polysilicon, Temperature, Transients (Dynamics), Heat transfer, Wall temperature

Journal Articles

Thermal Bubble Formation on Polysilicon Micro Resistors

Liwei Lin, A. P. Pisano, V. P. Carey

Publisher: ASME

J. Heat Mass Transfer. August 1998, 120(3): 735–742.

https://doi.org/10.1115/1.2824343

Published Online: August 1, 1998

View Article titled, Thermal Bubble Formation on Polysilicon Micro Resistors

Topics: Bubbles, Polysilicon, Resistors

Journal Articles

Heat Transfer in Excimer Laser Melting of Thin Polysilicon Layers

X. Xu, C. P. Grigoropoulos, R. E. Russo

Publisher: ASME

J. Heat Mass Transfer. August 1995, 117(3): 708–715.

https://doi.org/10.1115/1.2822634

Published Online: August 1, 1995

View Article titled, Heat Transfer in Excimer Laser Melting of Thin Polysilicon Layers

Topics: Excimer lasers, Heat transfer, Melting, Polysilicon, Temperature, Solidification, Equilibrium (Physics), Lasers, Manufacturing, Materials processing

Journal Articles

Transient Temperature During Pulsed Excimer Laser Heating of Thin Polysilicon Films Obtained by Optical Reflectivity Measurement

X. Xu, C. P. Grigoropoulos, R. E. Russo

Publisher: ASME

J. Heat Mass Transfer. February 1995, 117(1): 17–24.

https://doi.org/10.1115/1.2822301

Published Online: February 1, 1995

View Article titled, Transient Temperature During Pulsed Excimer Laser Heating of Thin Polysilicon Films Obtained by Optical Reflectivity Measurement

Topics: Excimer lasers, Heating, Lasers, Polysilicon, Reflectance, Temperature, Transients (Dynamics), Chemical vapor deposition, Heat transfer, Manufacturing

Journal citation

NARROW

Cross-Plane Phonon Conduction in Polycrystalline Silicon Films

Raman Thermometry Measurements and Thermal Simulations for MEMS Bridges at Pressures From 0.05 Torr to 625 Torr

Thermal Conductivity Measurements on Polycrystalline Silicon Microbridges Using the 3 ω Technique

Raman Thermometry of Polysilicon Microelectro-mechanical Systems in the Presence of an Evolving Stress

Transient Thermal Bubble Formation on Polysilicon Micro-Resisters

Thermal Bubble Formation on Polysilicon Micro Resistors

Heat Transfer in Excimer Laser Melting of Thin Polysilicon Layers

Transient Temperature During Pulsed Excimer Laser Heating of Thin Polysilicon Films Obtained by Optical Reflectivity Measurement

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