...Y. Yun; Y. Li In recent years, many applications in precision engineering require a careful isolation of the instrument from the vibration sources by adopting active vibration isolation system to achieve a very low remaining vibration level, especially for the very low frequency under 10 Hz...

... 24 11 2009 09 02 2010 09 02 2010 actuators control system synthesis fasteners nanomechanics position control precision engineering servomotors three-term control nanometer positioning ball screw PID controller saturation The fast development...

... time-varying Q -filter bandwidth provides faster convergence to lower error than the optimal time-invariant bandwidth. 30 10 2006 13 02 2008 29 07 2008 adaptive control iterative methods learning systems low-pass filters motion control precision engineering servomechanisms...

... actuators feedback Lyapunov methods magnetic hysteresis magnetostrictive devices nonlinear control systems precision engineering robust control servomechanisms variable structure systems This paper addresses a design of a nonlinear control methodology for a magnetostrictive system...

... magnets position control precision engineering process control semiconductor device manufacture A novel electromagnetic-force-generation scheme was developed to operate this maglev stage. In this section, we present the actuation scheme and analyze the forces. This stage has a Y-shaped...

... multi-dimensional positioner Gaussian least squares differential correction position control motion control magnetic levitation Fourier series motion measurement Gaussian processes least squares approximations precision engineering Hall effect devices The closed-loop responses...

... feedback tracking precision engineering PI control hysteresis 27 August 2003 12 04 2004 Contributed by the Dynamic Systems, Measurement, and Control Division of THE AMERICAN SOCIETY OF MECHANICAL ENGINEERS for publication in the ASME JOURNAL OF DYNAMIC SYSTEMS, MEASUREMENT...