Abstract

A new approach to measure the elastic modulus of nanowires is presented in this paper using a nanowire and a microcantilever beam composite system. The mechanical behavior of a nanowire-microcantilever beam structure under electrostatic actuation was studied using the finite element method, and a comparison of the resonance frequencies for a nanowire-microcantilever composite beam structure and a microcantilever beam only is presented. The test system can be optimized by introducing arrays of nanowires to increase the resonance frequency difference between the microcantilever beams and the nanowire array microbeam structures.

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