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research-article

A Micromachined PMN-PT Single Crystal Composite Circular Array for Intravascular Ultrasound Imaging

[+] Author and Article Information
Sibo Li

North Carolina State University, RM 3282, EB 3, 911 Oval Dr., Raleigh, NC 27606
sli26@ncsu.edu

Jian Tian

CTS Corporation, 479 Quadrangle Drive, Suite E, Bolingbrook, IL 60440
jtian8@gmail.com

Xiaoning Jiang

North Carolina State University, RM 3282, EB 3, 911 Oval Dr., Raleigh, NC 27606
xjiang5@ncsu.edu

1Corresponding author.

ASME doi:10.1115/1.4041443 History: Received February 25, 2018; Revised September 09, 2018

Abstract

This paper describes the design, fabrication, and characterization of a micromachined high-frequency Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT) single crystal/epoxy 1-3 composite ultrasound circular array. The 1-3 composites were fabricated by deep reactive ion etching of PMN-PT single crystal. The feature size of single crystal pillars was 18-micron meters in diameter. The kerf between pillars was less than 4-micron meters. A 50-element circular array transducer (radially outwards) with the pitch of 100-micron meters was wrapped around a needle resulting in an outer diameter of 1.7 mm. The array test showed that the center frequency reached 39±2 MHz and -6-dB fractional bandwidth was 82±6%. The insertion loss was -41 dB, and crosstalk between adjacent elements was -24 dB. A radial outward imaging testing with phantom wires (D = 50-micron meters) was conducted. The image was in a dynamic range of 30 dB to show a penetration depth of 6 mm by using the synthetic aperture method. The -6-dB beam width was estimated to be 60-micron meters in the axial direction at 3.1 mm distance away from the probe. The results suggest that the 40 MHz micromachined 1-3 composite circular array is promising for intravascular ultrasound imaging applications.

Copyright (c) 2018 by ASME
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