A Micromachined PMN-PT Single Crystal Composite Circular Array for Intravascular Ultrasound Imaging

[+] Author and Article Information
Sibo Li

North Carolina State University, RM 3282, EB 3, 911 Oval Dr., Raleigh, NC 27606

Jian Tian

CTS Corporation, 479 Quadrangle Drive, Suite E, Bolingbrook, IL 60440

Xiaoning Jiang

North Carolina State University, RM 3282, EB 3, 911 Oval Dr., Raleigh, NC 27606

1Corresponding author.

ASME doi:10.1115/1.4041443 History: Received February 25, 2018; Revised September 09, 2018


This paper describes the design, fabrication, and characterization of a micromachined high-frequency Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT) single crystal/epoxy 1-3 composite ultrasound circular array. The 1-3 composites were fabricated by deep reactive ion etching of PMN-PT single crystal. The feature size of single crystal pillars was 18-micron meters in diameter. The kerf between pillars was less than 4-micron meters. A 50-element circular array transducer (radially outwards) with the pitch of 100-micron meters was wrapped around a needle resulting in an outer diameter of 1.7 mm. The array test showed that the center frequency reached 39±2 MHz and -6-dB fractional bandwidth was 82±6%. The insertion loss was -41 dB, and crosstalk between adjacent elements was -24 dB. A radial outward imaging testing with phantom wires (D = 50-micron meters) was conducted. The image was in a dynamic range of 30 dB to show a penetration depth of 6 mm by using the synthetic aperture method. The -6-dB beam width was estimated to be 60-micron meters in the axial direction at 3.1 mm distance away from the probe. The results suggest that the 40 MHz micromachined 1-3 composite circular array is promising for intravascular ultrasound imaging applications.

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